TEMPERATURE-DEPENDENCE IN SPUTTERING

被引：1
|
作者：
LEE, HY [1 ]
机构：
[1] KOREA ATOM ENERGY RES INST,SEOUL 131,SOUTH KOREA
来源：
RADIATION EFFECTS LETTERS | 1979年 / 43卷 / 4-5期
关键词：
D O I：
10.1080/01422447908229243
中图分类号：
TL [原子能技术]; O571 [原子核物理学];
学科分类号：
0827 ; 082701 ;
摘要：
引用
收藏
页码：161 / 172
页数：12
相关论文
共 50 条
  • [1] TEMPERATURE-DEPENDENCE OF SPUTTERING COEFFICIENT OF COPPER
    VAULIN, EP
    GEORGIEVA, NE
    MARTYNENKO, TP
    FIZIKA TVERDOGO TELA, 1977, 19 (05): : 1423 - 1425
  • [2] TEMPERATURE-DEPENDENCE OF SPUTTERING COEFFICIENT OF SILICON
    LABUNOV, VA
    BORISENKO, VE
    FIZIKA TVERDOGO TELA, 1978, 20 (04): : 1235 - 1237
  • [3] TEMPERATURE-DEPENDENCE OF THE SPUTTERING MORPHOLOGY OF PT(111)
    MICHELY, T
    COMSA, G
    SURFACE SCIENCE, 1991, 256 (03) : 217 - 226
  • [4] TEMPERATURE-DEPENDENCE OF ZN AND CU IONIC SPUTTERING
    BANSHCHIKOV, AG
    KORSUKOV, VE
    SAVELEV, AG
    FIZIKA TVERDOGO TELA, 1984, 26 (02): : 540 - 541
  • [5] THE TEMPERATURE-DEPENDENCE OF THE SPUTTERING YIELD OF NOBLE-METALS
    LEE, HY
    CHANG, HY
    PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1993, 67 (01): : 97 - 105
  • [6] TEMPERATURE-DEPENDENCE OF HYDROGEN SPUTTERING OF CARBON COATINGS ON PLATINUM
    SMITH, JN
    MEYER, CH
    JOURNAL OF NUCLEAR MATERIALS, 1978, 76-7 (1-2) : 193 - 198
  • [7] TEMPERATURE-DEPENDENCE OF SPUTTERING YIELD OF SILICON AND GERMANIUM TARGETS
    NIZAM, J
    BENAZETHCOLOMBIE, N
    REVUE DE PHYSIQUE APPLIQUEE, 1975, 10 (04): : 183 - 186
  • [8] TEMPERATURE-DEPENDENCE OF SPUTTERING IN THE SI/AR+/F SYSTEM
    GORBATOV, YB
    ZINENKO, VI
    PISMA V ZHURNAL TEKHNICHESKOI FIZIKI, 1989, 15 (15): : 1 - 4
  • [9] TEMPERATURE-DEPENDENCE OF SPUTTERING BEHAVIOR OF CU-LI ALLOYS
    BOHDANSKY, J
    ROTH, J
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 23 (04): : 518 - 520
  • [10] TEMPERATURE-DEPENDENCE OF HALL-EFFECT AND MOBILITY OF SPUTTERING TANTALUM FILMS
    RACHMANN, J
    JUERGENS, W
    THIN SOLID FILMS, 1975, 26 (02) : 305 - 310
12345