TEMPERATURE-DEPENDENCE IN SPUTTERING

[1] ALMEN O, 1961, NUCL INSTR METH, V11, P258

[2] SURFACE PHENOMENA USEFUL IN VACUUM TECHNIQUE [J]. INDUSTRIAL AND ENGINEERING CHEMISTRY, 1948, 40 (05): : 846 - 847

[3] BECKER JA, 1953, J PHYS CHEM, V57, P159

[4] Carslaw H. S., 1959, CONDUCTION HEAT SOLI, P256

[5] DULONG PL, ANN CHIM PHYS, V10, P395

[6] THE THERMAL ACCOMMODATION COEFFICIENT OF GASES AND THEIR ADSORPTION ON IRON [J]. TRANSACTIONS OF THE FARADAY SOCIETY, 1952, 48 (08): : 738 - 749

[7] JURELA Z, 1972, RAD EFFECTS, V13, P169

[8] KELLY R, 1977, RAD EFF, V32, P92

[9] LAUBITZ MJ, 1972, PHYS REV B, V6, P2087

[10] MAKINSON REB, 1938, P CAMBRIDGE PHIL SOC, V34, P490

[1] ALMEN O, 1961, NUCL INSTR METH, V11, P258

[2] SURFACE PHENOMENA USEFUL IN VACUUM TECHNIQUE [J]. INDUSTRIAL AND ENGINEERING CHEMISTRY, 1948, 40 (05): : 846 - 847

[3] BECKER JA, 1953, J PHYS CHEM, V57, P159

[4] Carslaw H. S., 1959, CONDUCTION HEAT SOLI, P256

[5] DULONG PL, ANN CHIM PHYS, V10, P395

[6] THE THERMAL ACCOMMODATION COEFFICIENT OF GASES AND THEIR ADSORPTION ON IRON [J]. TRANSACTIONS OF THE FARADAY SOCIETY, 1952, 48 (08): : 738 - 749

[7] JURELA Z, 1972, RAD EFFECTS, V13, P169

[8] KELLY R, 1977, RAD EFF, V32, P92

[9] LAUBITZ MJ, 1972, PHYS REV B, V6, P2087

[10] MAKINSON REB, 1938, P CAMBRIDGE PHIL SOC, V34, P490