PROSPECTS OF THE EMPLOYMENT OF SYNCHROTRON-RADIATION IN FILM ELECTROSTATIC ACTUATOR TECHNOLOGY

被引：5
作者：
DYATLOV, VL
KONYASHKIN, VV
POTAPOV, BS
PYANKOV, YA
机构：
[1] Institute of Mathematics, 630090 Novosibirsk
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT | 1995年 / 359卷 / 1-2期
关键词：
D O I：
10.1016/0168-9002(94)01394-2
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
[No abstract available]
引用
收藏
页码：394 / 395
页数：2
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[4]   THE FABRICATION OF AN ELECTROSTATIC LINEAR-ACTUATOR BY SILICON MICROMACHINING [J].
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IEEE TRANSACTIONS ON ELECTRON DEVICES, 1988, 35 (06) :731-734
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PARAMO PG, 1985, METALURGIA ELECTRICI, V565, P78
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