RECENT PROGRESS IN CATHODIC SPUTTERING EQUIPMENT FOR PRODUCTION

被引：0
|
作者：
CAMBEY, LA [1 ]
机构：
[1] MAT RES CORP,ORANGEBURG,NY 10962
来源：
VIDE-SCIENCE TECHNIQUE ET APPLICATIONS | 1973年 / 28卷 / 165-期
关键词：
D O I：
暂无
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：141 / 145
页数：5
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