ELECTRICAL-CONDUCTIVITY AND OPTICAL TRANSMITTANCE OF SPUTTER-DEPOSITED SNOX THIN-FILMS

被引：29
作者：
STJERNA, B
GRANQVIST, CG
机构：
[1] Physics Department, Chalmers University of Technology, University of Gothenburg
来源：
SOLAR ENERGY MATERIALS | 1990年 / 20卷 / 03期
关键词：
D O I：
10.1016/0165-1633(90)90007-N
中图分类号：
TE [石油、天然气工业]; TK [能源与动力工程];
学科分类号：
0807 ; 0820 ;
摘要：
Non-stoichiometric SnOx thin films were made by RF magnetron sputtering of Sn in Ar+O2 onto unheated glass. Electrical DC resistivity (ρ{variant}) as well as spectral transmittance and reflectance were studied as a function of sputtering parameters. A sharp minimum in ρ{variant} was observed at a well-defined gas composition. Optimized parameters gave films with ρ{variant}≈3sx10-3Ωcm at low deposition rate (r), and ρ{variant}≈10-2Ω cm at r ≈ 3 nm/s. The luminous transmittance was ∼ 75%. © 1990.
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页码：225 / 233
页数：9
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