ELECTRICAL CHARACTERISTICS OF HIGH-MOBILITY FINE-GRAIN POLY-SI TFTS FROM LASER IRRADIATED SPUTTER-DEPOSITED SI FILM

被引：61

作者：

SERIKAWA, T

SHIRAI, S

OKAMOTO, A

SUYAMA, S

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1989年 / 28卷 / 11期

关键词：

D O I：

10.1143/JJAP.28.L1871

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：L1871 / L1873

页数：3

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