An atmospheric pressure waveguide-fed microwave plasma torch: the TIA design

被引:185
|
作者
Moisan, M. [1 ]
Sauve, G. [1 ]
Zakrzewski, Z. [2 ]
Hubert, J. [3 ]
机构
[1] Univ Montreal, Dept Phys, Montreal, PQ H3C 3J7, Canada
[2] Polish Acad Sci, IMP PAN, PL-80952 Gdansk, Poland
[3] Univ Montreal, Dept Chim, Montreal, PQ H3C 3J7, Canada
来源
PLASMA SOURCES SCIENCE & TECHNOLOGY | 1994年 / 3卷 / 04期
关键词
D O I
10.1088/0963-0252/3/4/016
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
We report theoretical and experimental investigations of an atmospheric pressure, microwave plasma torch with axial gas injection (torche A injection axiale design). It is a waveguide-based structure comprising both waveguide and coaxial elements serving the purpose of wavemode conversion and impedance-matching. The device includes features common to various waveguide-fed torches disclosed previously by other authors, but not yet modelled. Our paper provides a simple equivalent circuit description of the torch operation that accounts for its impedance-matching, power transfer to plasma and tuning characteristics, as verified experimentally. From the outcome of the model and using our experimental results, we introduce new features in the torch design that enable one to optimize its performance. We also examine ways of simplifying its structure and operation.
引用
收藏
页码:584 / 592
页数:9
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