A SLOT ANTENNA-COUPLED MICROBOLOMETER FOR DETECTION AT 94 GHz

被引：2

作者：

Abdel-Rahman, M. ^{[1
]}

Al-Khalli, N. ^{[2
]}

Kusuma, A. ^{[3
]}

Debbar, N. ^{[2
]}

机构：

[1] King Saud Univ, Coll Engn, Prince Sultan Adv Technol Res Inst PSATRI, POB 800, Riyadh 11421, Saudi Arabia

[2] King Saud Univ, Coll Engn, Elect Engn Dept, Riyadh 11421, Saudi Arabia

[3] PT Telekomun Indonesia Tbk, Jakarta, Indonesia

来源：

PROGRESS IN ELECTROMAGNETICS RESEARCH LETTERS | 2012年 / 32卷

关键词：

D O I：

10.2528/PIERL12042503

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper, we report on the design, fabrication and characterization of a slot antenna on a quarter wavelength silicon (Si) substrate coupled to an uncooled titanium (Ti) microbolometer for detection at 94 GHz. The detector was fabricated using conventional photolithographic and microfabrication techniques. The detector exhibited a voltage responsivity (R upsilon) of 0.779 V/W, a noise equivalent power (NEP) of 10.2 nW/ root Hz, and a time constant (tau) of 3.88 mu sec.

引用

页码：137 / 143

页数：7

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