A SLOT ANTENNA-COUPLED MICROBOLOMETER FOR DETECTION AT 94 GHz

被引:2
作者
Abdel-Rahman, M. [1 ]
Al-Khalli, N. [2 ]
Kusuma, A. [3 ]
Debbar, N. [2 ]
机构
[1] King Saud Univ, Coll Engn, Prince Sultan Adv Technol Res Inst PSATRI, POB 800, Riyadh 11421, Saudi Arabia
[2] King Saud Univ, Coll Engn, Elect Engn Dept, Riyadh 11421, Saudi Arabia
[3] PT Telekomun Indonesia Tbk, Jakarta, Indonesia
来源
PROGRESS IN ELECTROMAGNETICS RESEARCH LETTERS | 2012年 / 32卷
关键词
D O I
10.2528/PIERL12042503
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this paper, we report on the design, fabrication and characterization of a slot antenna on a quarter wavelength silicon (Si) substrate coupled to an uncooled titanium (Ti) microbolometer for detection at 94 GHz. The detector was fabricated using conventional photolithographic and microfabrication techniques. The detector exhibited a voltage responsivity (R upsilon) of 0.779 V/W, a noise equivalent power (NEP) of 10.2 nW/ root Hz, and a time constant (tau) of 3.88 mu sec.
引用
收藏
页码:137 / 143
页数:7
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