VOLATILITY OF METAL BETA-DIKETONATES FOR CHEMICAL VAPOR-DEPOSITION OF OXIDE SUPERCONDUCTORS

被引：41
作者：
OZAWA, T
机构：
[1] Tsukuba Research Center, Daicel Chemical Industries, Ltd., Tsukuba, Ibaraki
来源：
THERMOCHIMICA ACTA | 1991年 / 174卷
关键词：
D O I：
10.1016/0040-6031(91)80160-K
中图分类号：
O414.1 [热力学];
学科分类号：
摘要：
For chemical vapor deposition, in which vapors of metallic organic compounds are introduced and decomposed over a substrate to form thin films, data on the volatility of the compounds are of essential importance as basic data. Thermal analysis is a useful tool for observing volatility. The application of thermal analysis, and the results for metal beta-diketonates with respect to chemical vapor deposition of oxide superconductors are summarized. Problems to be solved are also pointed out.
引用
收藏
页码：185 / 199
页数：15
相关论文
共 58 条
[31]   DSC STUDY OF BENZOIC-ACID - SUGGESTED CALIBRANT COMPOUND [J].
MURRAY, JP ;
CAVELL, KJ ;
HILL, JO .
THERMOCHIMICA ACTA, 1980, 36 (01) :97-101
[32]   DSC DETERMINATION OF THE SUBLIMATION ENTHALPY OF TRIS(2,4-PENTANEDIONATO)COBALT(III) AND BIS(2,4-PENTANEDIONATO)NICKEL(II) AND BIS(2,4-PENTANTANEDIONATO)COPPER(II) [J].
MURRAY, JP ;
HILL, JO .
THERMOCHIMICA ACTA, 1987, 109 (02) :383-390
[33]  
NESTERENKO GN, 1979, ZH ANAL KHIMII, V34, P1958
[34]   CHEMICAL VAPOR-DEPOSITION OF YBA2CU3O7 USING METALORGANIC CHELATE PRECURSORS [J].
PANSON, AJ ;
CHARLES, RG ;
SCHMIDT, DN ;
SZEDON, JR ;
MACHIKO, GJ ;
BRAGINSKI, AI .
APPLIED PHYSICS LETTERS, 1988, 53 (18) :1756-1758
[35]   VOLATILE RARE EARTH CHELATES OF 1,1,1,5,5,5-HEXAFLUORO-2,4-PENTANEDIONE AND 1,1,1,2,2,3,3,7,7,7-DECAFLUORO-4,6-HEPTANEDIONE [J].
RICHARDSON, MF ;
SIEVERS, RE .
INORGANIC CHEMISTRY, 1971, 10 (03) :498-+
[36]  
RIHESON DS, 1989, APPL PHYS LETT, V54, P2154
[37]  
SCHWARBERG JE, 1970, ANAL CHEM, V42, P1878
[38]   GAS CHROMATOGRAPHY OF RARE EARTH CHELATES OF PIVALOYLTRIFLUOROACETONE [J].
SHIGEMATSU, T ;
MATSUI, M ;
UTSUNOMI.K .
BULLETIN OF THE CHEMICAL SOCIETY OF JAPAN, 1968, 41 (03) :763-+
[39]   GAS CHROMATOGRAPHY OF RARE EARTH CHELATES OF PIVALOYLTRIFLUOROACETONE [J].
SHIGEMATSU, T ;
MATSUI, M ;
UTSUNOMIYA, K .
BULLETIN OF THE CHEMICAL SOCIETY OF JAPAN, 1969, 42 (05) :1278-+
[40]   VOLATILE LANTHANIDE CHELATES .2. VAPOR PRESSURES HEATS OF VAPORIZATION AND HEATS OF SUBLIMATION [J].
SICRE, JE ;
DUBOIS, JT ;
EISENTRAUT, KJ ;
SIEVERS, RE .
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1969, 91 (13) :3476-+
123456