VOLATILITY OF METAL BETA-DIKETONATES FOR CHEMICAL VAPOR-DEPOSITION OF OXIDE SUPERCONDUCTORS

被引：41
作者：
OZAWA, T
机构：
[1] Tsukuba Research Center, Daicel Chemical Industries, Ltd., Tsukuba, Ibaraki
来源：
THERMOCHIMICA ACTA | 1991年 / 174卷
关键词：
D O I：
10.1016/0040-6031(91)80160-K
中图分类号：
O414.1 [热力学];
学科分类号：
摘要：
For chemical vapor deposition, in which vapors of metallic organic compounds are introduced and decomposed over a substrate to form thin films, data on the volatility of the compounds are of essential importance as basic data. Thermal analysis is a useful tool for observing volatility. The application of thermal analysis, and the results for metal beta-diketonates with respect to chemical vapor deposition of oxide superconductors are summarized. Problems to be solved are also pointed out.
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页码：185 / 199
页数：15
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