BI-SUBSTITUTED GARNET-FILMS CRYSTALLIZED DURING RF SPUTTERING FOR M-O MEMORY

被引:23
作者
GOMI, M
OKAZAKI, T
ABE, M
机构
[1] Department of Physical Electronics, Tokyo Institute of Technology, Ookayuma, Meguro-ku
关键词
D O I
10.1109/TMAG.1987.1065444
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We have successfully got Bi-substituted garnet films on glass substrates by in situ sputter growth above 500 °C. When sputter crystallized just above 500 ·C, the films had a good surface smoothness and a high crystallographic quality as compared to the post-an-nealed film. The films had a preferred crystal orientation of (220) and (444) planes parallel to the film surface when grown under low gass pressure less than 8 mTorr. The magnetic and magneto-optic properties of these films were studied and the static M-O recording was performed. © 1987 IEEE
引用
收藏
页码:2967 / 2969
页数:3
相关论文
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