A VALVELESS DIFFUSER/NOZZLE-BASED FLUID PUMP

被引:564
作者
STEMME, E [1 ]
STEMME, G [1 ]
机构
[1] ROYAL INST TECHNOL,INSTRUMENTAT LAB,S-10044 STOCKHOLM,SWEDEN
关键词
D O I
10.1016/0924-4247(93)80213-Z
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A new valveless fluid pump has been designed and tested. The pump consists of two fluid diffuser/nozzle elements on each side of a chamber volume with an oscillating diaphragm. The vibrating diaphragm produces an oscillating chamber volume, which together with the two fluid-flow-rectifying diffuser/nozzle elements, creates a one-way fluid flow. A micropump prototype with a chamber diameter of 19 mm with conical diffuser/nozzle elements has been built and tested. The maximum liquid flow rate is 16 ml/min and the maximum pump pressure is 2 m H2O. The pump frequency is of the order of 100 Hz.
引用
收藏
页码:159 / 167
页数:9
相关论文
共 13 条
[1]  
FAROOQUI MM, 1992, MICRO ELECTRO MECHAN, P150
[2]   A MICROMACHINED ELECTROHYDRODYNAMIC (EHD) PUMP [J].
RICHTER, A ;
PLETTNER, A ;
HOFMANN, KA ;
SANDMAIER, H .
SENSORS AND ACTUATORS A-PHYSICAL, 1991, 29 (02) :159-168
[3]  
RUNDSTADLER PW, 1975, DIFFUSER DATA BOOK
[4]   MICROPUMP AND SAMPLE-INJECTOR FOR INTEGRATED CHEMICAL ANALYZING SYSTEMS [J].
SHOJI, S ;
NAKAGAWA, S ;
ESASHI, M .
SENSORS AND ACTUATORS A-PHYSICAL, 1990, 21 (1-3) :189-192
[5]  
SMITH L, 1990, 1990 C P MICR EUR MM, P53
[6]   PIEZOELECTRIC MICROPUMP WITH 3 VALVES WORKING PERISTALTICALLY [J].
SMITS, JG .
SENSORS AND ACTUATORS A-PHYSICAL, 1990, 21 (1-3) :203-206
[7]   ELECTRONICALLY CONTROLLED PIEZOELECTRIC INSULIN PUMP AND VALVES [J].
SPENCER, WJ ;
CORBETT, WT ;
DOMINGUEZ, LR ;
SHAFER, BD .
IEEE TRANSACTIONS ON SONICS AND ULTRASONICS, 1978, 25 (03) :153-156
[8]  
STEMME E, Patent No. 93006047
[9]  
VANDEPOI FCM, 1989, THESIS U TWENTE
[10]   A THERMO-PNEUMATIC ACTUATION PRINCIPLE FOR A MICROMINIATURE PUMP AND OTHER MICROMECHANICAL DEVICES [J].
VANDEPOL, FCM ;
WONNINK, DGJ ;
ELWENSPOEK, M ;
FLUITMAN, JHJ .
SENSORS AND ACTUATORS, 1989, 17 (1-2) :139-143