MEASUREMENT OF ETCHING AFTER IRRADIATION WITH CHARGED-PARTICLES BY USING THE MATRIX ACTIVATION

被引:2
作者
VALLADON, M
BLONDIAUX, G
GIOVAGNOLI, A
KOEMMERER, C
DEBRUN, JL
机构
关键词
D O I
10.1016/S0003-2670(01)84310-5
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
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页码:25 / 32
页数:8
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