KINETICS OF EVAPORATION OF VITREOUS GE2SE3 AND DEPOSITION OF AMORPHOUS THIN-FILMS

被引：7
作者：
FELTZ, A
KAPS, C
机构：
来源：
THIN SOLID FILMS | 1980年 / 70卷 / 01期
关键词：
D O I：
10.1016/0040-6090(80)90419-8
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
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页码：117 / 125
页数：9
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