DEVELOPMENT OF A COMPACT ELECTRON-BEAM ION-SOURCE COOLED WITH LIQUID-NITROGEN

被引：38
|
作者：
OKUNO, K
机构：
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1989年 / 28卷 / 06期
关键词：
D O I：
10.1143/JJAP.28.1124
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
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页码：1124 / 1131
页数：8
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