ACCURATE MEASUREMENT OF ATOMIC-BEAM FLUX BY PSEUDO-DOUBLE-BEAM ATOMIC-ABSORPTION SPECTROSCOPY FOR GROWTH OF THIN-FILM OXIDE SUPERCONDUCTORS

被引:69
作者
KLAUSMEIERBROWN, ME
ECKSTEIN, JN
BOZOVIC, I
VIRSHUP, GF
机构
[1] Varian Research Center, Palo Alto
关键词
D O I
10.1063/1.106584
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report the use of pseudo-double-beam atomic absorption spectroscopy to make very accurate (0.1%-1%) measurements of the beam flux from Knudsen effusion cells in a molecular beam epitaxy system. This system has been used to grow Bi-Sr-Ca-Cu-O-based superconducting thin films and heterostructures in an atomic-layer-by-layer fashion. The resulting material displays excellent crystallographic and transport properties. Atomic absorption measurement of beam fluxes may also be of benefit for other materials systems, such as InGaAs/InP.
引用
收藏
页码:657 / 659
页数:3
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