SURFACE PREPARATION FOR THE HETEROEPITACTIC GROWTH OF CERAMIC THIN-FILMS

被引：74
作者：
NORTON, MG
SUMMERFELT, SR
CARTER, CB
机构：
来源：
APPLIED PHYSICS LETTERS | 1990年 / 56卷 / 22期
关键词：
D O I：
10.1063/1.103246
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The morphology, composition, and crystallographic orientation of the substrate influence the nucleation and growth of deposited thin films. A method for the preparation of controlled, characteristic surfaces is reported. The surfaces are suitable for the heteroepitactic growth of thin films. When used in the formation of electron-transparent thin foils, the substrates can be used to investigate the very early stages of film growth using transmission electron microscopy. The substrate preparation involves the cleaning and subsequent annealing to generate a surface consisting of a series of steps. The step terraces are formed on the energetically stable surface, and controlled nucleation and growth of films at step edges is found. The substrate materials prepared using this technique include (001) MgO, (001) SrTiO3, and (001) LaAlO3.
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页码：2246 / 2248
页数：3
相关论文
共 13 条
[1]  
Basu S, UNPUB
[2]   OBSERVATION OF THE EARLY STAGES OF GROWTH OF SUPERCONDUCTING THIN-FILMS BY TRANSMISSION ELECTRON-MICROSCOPY [J].
NORTON, MG ;
TIETZ, LA ;
SUMMERFELT, SR ;
CARTER, CB .
APPLIED PHYSICS LETTERS, 1989, 55 (22) :2348-2350
[3]  
NORTON MG, IN PRESS P MATER RES, V169
[4]  
NORTON ML, UNPUB
[5]   FERRIMAGNETIC RARE-EARTH ORTHO-FERRITES - A NEW, MAGNETIC SUBSTRATE FOR THE GROWTH OF EPITAXIAL Y-BA-CU-O THIN-FILMS [J].
RAMESH, R ;
INAM, A ;
BONNER, WA ;
ENGLAND, P ;
WILKENS, BJ ;
MEAGHER, BJ ;
NAZAR, L ;
WU, XD ;
HEGDE, MS ;
CHANG, CC ;
VENKATESAN, T ;
PADAMSEE, H .
APPLIED PHYSICS LETTERS, 1989, 55 (11) :1138-1140
[6]  
RUSSEK SE, IN PRESS P MATER RES, V169
[7]  
SUSNITZKY DW, 1986, J AM CERAM SOC, V69, pC217, DOI 10.1111/j.1151-2916.1986.tb07484.x
[8]  
SUSNITZKY DW, 1988, P MATER RES SOC S, V122, P541
[9]  
SUSNITZKY DW, 1988, THESIS CORNELL U
[10]  
Tasker P.W., 1984, ADV CERAM, P176
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