MICROSCOPIC PROCESSES IN DEPOSITION-CONCURRENT SURFACE SEGREGATION

被引:7
作者
SANO, K
MIYAGAWA, T
机构
[1] Research Institute for Metal Surfaces, High Performance Inc. (RIMES), Technical Research Division, Chiba
关键词
D O I
10.1016/0169-4332(92)90517-2
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
During the epitaxial growth process of Fe and Au films on GaAs(001)-4 x 6, we observed various types of deposition-concurrent surface segregations (DCSS). We have investigated the microscopic processes of DCSS using the in situ observation techniques of reflection high-energy electron diffraction (RHEED) and Auger electron spectroscopy (AES). The process of DCSS consists of two stages, the initial segregation stage in which deposited atoms react with a substrate to initiate a segregation and the continuous segregation stage which subsequently keeps the segregated atoms atop the film surface without being buried under later deposited atoms. An atomistic model for the continuous segregation stage has been proposed. We have discussed the application of the DCSS phenomenon to surfactant-mediated epitaxy techniques.
引用
收藏
页码:813 / 819
页数:7
相关论文
共 15 条
[1]   MAGNETIC-PROPERTIES OF NOVEL EPITAXIAL-FILMS [J].
BADER, SD ;
MOOG, ER .
JOURNAL OF APPLIED PHYSICS, 1987, 61 (08) :3729-3734
[2]   SIMULTANEOUS EPITAXY AND SUBSTRATE OUT-DIFFUSION AT A METAL-SEMICONDUCTOR INTERFACE - FE/GAAS(001)-C(8X2) [J].
CHAMBERS, SA ;
XU, F ;
CHEN, HW ;
VITOMIROV, IM ;
ANDERSON, SB ;
WEAVER, JH .
PHYSICAL REVIEW B, 1986, 34 (10) :6605-6611
[3]   EPITAXIAL FILM CRYSTALLOGRAPHY BY HIGH-ENERGY AUGER AND X-RAY PHOTOELECTRON DIFFRACTION [J].
CHAMBERS, SA .
ADVANCES IN PHYSICS, 1991, 40 (04) :357-415
[4]   BIRTH DEATH MODELS OF EPITAXY .1. DIFFRACTION OSCILLATIONS FROM LOW INDEX SURFACES [J].
COHEN, PI ;
PETRICH, GS ;
PUKITE, PR ;
WHALEY, GJ ;
ARROTT, AS .
SURFACE SCIENCE, 1989, 216 (1-2) :222-248
[5]   SURFACTANTS IN EPITAXIAL-GROWTH [J].
COPEL, M ;
REUTER, MC ;
KAXIRAS, E ;
TROMP, RM .
PHYSICAL REVIEW LETTERS, 1989, 63 (06) :632-635
[6]   INFLUENCE OF SURFACTANTS IN GE AND SI EPITAXY ON SI(001) [J].
COPEL, M ;
REUTER, MC ;
VONHOEGEN, MH ;
TROMP, RM .
PHYSICAL REVIEW B, 1990, 42 (18) :11682-11689
[7]   ARE BARE SURFACES DETRIMENTAL IN EPITAXIAL-GROWTH [J].
COPEL, M ;
TROMP, RM .
APPLIED PHYSICS LETTERS, 1991, 58 (23) :2648-2650
[8]   THE ROLE OF ADSORBED GASES IN METAL ON METAL EPITAXY [J].
EGELHOFF, WF ;
STEIGERWALD, DA .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1989, 7 (03) :2167-2173
[9]   STRUCTURE AND PHASES OF THE AU(001) SURFACE - INPLANE STRUCTURE [J].
GIBBS, D ;
OCKO, BM ;
ZEHNER, DM ;
MOCHRIE, SGJ .
PHYSICAL REVIEW B, 1990, 42 (12) :7330-7344
[10]  
HIGUCHI S, 1991, SURF SCI, V254, pL465, DOI 10.1016/0039-6028(91)90625-3