COMBINED USE OF DIFFERENTIAL SCANNING CALORIMETRY AND CROSS-SECTIONAL TRANSMISSION ELECTRON-MICROSCOPY FOR CHARACTERIZATION OF THIN-FILM REACTIONS

被引:0
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作者
MA, E
机构
[1] MIT,CAMBRIDGE,MA 02139
[2] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
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中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
We demonstrate that the combined use of differential scanning calorimetry (DSC) and cross-sectional transmission electron microscopy (XTEM) is a powerful technique in the quantitative investigation of the nucleation and growth of metastable and equilibrium phases during thin-film interdiffusion reactions. T.he Various approaches and advantages of the DSC/XTEM technique in obtaining a variety of kinetic and thermodynamic data are discussed. Explosive reactions, as opposed to conventionally controlled reactions, may occur in thin films where the multilayer geometry is used.
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页码:400 / 403
页数:4
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