AN ALL-NIOBIUM 8 LEVEL PROCESS FOR SMALL AND MEDIUM SCALE APPLICATIONS

被引：34

作者：

YU, LS

BERRY, CJ

DRAKE, RE

LI, K

PATT, R

RADPARVAR, M

WHITELEY, SR

FARIS, SM

机构：

来源：

IEEE TRANSACTIONS ON MAGNETICS | 1987年 / 23卷 / 02期

关键词：

D O I：

10.1109/TMAG.1987.1065093

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：1476 / 1479

页数：4

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