LANGMUIR PROBE MEASUREMENTS OF ELECTRON-TEMPERATURE IN AN INDUCTIVELY COUPLED PLASMA

被引:0
作者
LU, PQ
GONG, PZ
LIN, TZ
HOUK, RS
机构
[1] IOWA STATE UNIV SCI & TECHNOL,US DOE,AMES LAB,AMES,IA 50011
[2] ACAD SINICA,DALIAN INST CHEM PHYS,129 ST,DALIAN,PEOPLES R CHINA
[3] IOWA STATE UNIV SCI & TECHNOL,DEPT CHEM,AMES,IA 50011
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中图分类号
O433 [光谱学];
学科分类号
0703 ; 070302 ;
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页码:273 / 285
页数:13
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