THIN-FILM MODELING FOR MECHANICAL MEASUREMENTS - SHOULD MEMBRANES BE USED OR PLATES

被引：17

作者：

FARTASH, A ^{[1
]}

SCHULLER, IK ^{[1
]}

GRIMSDITCH, M ^{[1
]}

机构：

[1] ARGONNE NATL LAB,DIV MAT SCI,ARGONNE,IL 60439

来源：

JOURNAL OF APPLIED PHYSICS | 1992年 / 71卷 / 09期

关键词：

D O I：

10.1063/1.350804

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The two limits for modeling vibrating thin films, viz as a plate or as a membrane, are discussed. In terms of these limits the sources of experimental uncertanties are identified and the advantages of using films which can be modeled as membranes are explained. The mathematical formalism for treating films as vibrating membranes is developed and relations for self-consistency checks are presented. The drive mechanisms used to generate vibrations in the films are also discussed.

引用

页码：4244 / 4248

页数：5

共 15 条

[1] INTERNAL-STRESS AND INTERNAL-FRICTION IN THIN-LAYER MICROELECTRONIC MATERIALS [J].