3-DIMENSIONAL MICROFABRICATION USING SYNCHROTRON RADIATION

被引：102

作者：

EHRFELD, W ^{[1
]}

MUNCHMEYER, D ^{[1
]}

机构：

[1] MICROPARTS GESELLS MIKROSTRUKT TECH MBH,W-7500 KARLSRUHE 21,GERMANY

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT | 1991年 / 303卷 / 03期

关键词：

D O I：

10.1016/0168-9002(91)90289-3

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

For fabricating microstructures with extreme structural heights a technology has been developed which is based on deep-etch lithography and subsequent replication processes. A particularly high precision is achieved when the lithographic process is carried out by means of synchrotron radiation. Electroforming and molding processes are used for the replication of microstructures from a large variety of materials. The field of application comprises sensors, electrical and optical microconnectors, components for fluid technology, micromechanical components, microfiltration systems and novel composite materials.

引用

页码：523 / 531

页数：9

共 16 条

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EHRFELD, W ;

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[9]

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