EPITAXIAL-GROWTH AND DOPING OF AND DEVICE DEVELOPMENT IN MONOCRYSTALLINE BETA-SIC SEMICONDUCTOR THIN-FILMS

被引：40
作者：
DAVIS, RF
机构：
来源：
THIN SOLID FILMS | 1989年 / 181卷
关键词：
D O I：
10.1016/0040-6090(89)90468-9
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
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页码：1 / 15
页数：15
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