共 50 条
- [21] SOME APPLICATIONS OF MICROANALYTICAL TECHNIQUES IN VERY LARGE-SCALE INTEGRATED-CIRCUITS FABRICATION JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1989, 7 (03): : 1810 - 1817
- [22] COMPUTER-AIDED LAYOUT OF LARGE-SCALE INTEGRATED-CIRCUITS BASED ON CELLS NACHRICHTENTECHNISCHE ZEITSCHRIFT, 1978, 31 (12): : 906 - 910
- [26] A METROLOGICAL ELECTRON-MICROSCOPE SYSTEM FOR MICROFEATURES OF VERY LARGE-SCALE INTEGRATED-CIRCUITS REVIEW OF SCIENTIFIC INSTRUMENTS, 1990, 61 (03): : 975 - 979
- [27] ANALYSIS OF PROCESSING INDUCED DOPANT REDISTRIBUTION IN LARGE-SCALE INTEGRATED-CIRCUITS BY UTILIZING SIMS REPORT OF NRL PROGRESS, 1973, (SEP): : 38 - 40