REACTION AND STRUCTURE OF TI ON SI PROBED BY SURFACE EXTENDED ENERGY-LOSS FINE-STRUCTURE AND EXTENDED APPEARANCE POTENTIAL FINE-STRUCTURE

被引:10
作者
IDZERDA, YU [1 ]
WILLIAMS, ED [1 ]
EINSTEIN, TL [1 ]
PARK, RL [1 ]
机构
[1] UNIV MARYLAND,DEPT PHYS & ASTRON,COLLEGE PK,MD 20742
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 04期
关键词
D O I
10.1116/1.574323
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:847 / 851
页数:5
相关论文
共 31 条
  • [1] [Anonymous], 1967, HDB LATTICE SPACINGS
  • [2] Bianconi A, 1983, EXAFS NEAR EDGE STRU
  • [3] THE STRUCTURE AND PROPERTIES OF METAL-SEMICONDUCTOR INTERFACES
    Brillson, L. J.
    [J]. SURFACE SCIENCE REPORTS, 1982, 2 (02) : 123 - 326
  • [4] TITANIUM SILICON AND SILICON DIOXIDE REACTIONS CONTROLLED BY LOW-TEMPERATURE RAPID THERMAL ANNEALING
    BRILLSON, LJ
    SLADE, ML
    RICHTER, HW
    VANDERPLAS, H
    FULKS, RT
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (03): : 993 - 997
  • [5] CHEMICAL AND STRUCTURAL ASPECTS OF REACTION AT THE TI SI INTERFACE
    BUTZ, R
    RUBLOFF, GW
    TAN, TY
    HO, PS
    [J]. PHYSICAL REVIEW B, 1984, 30 (10): : 5421 - 5429
  • [6] CHEMICAL BONDING AND REACTIONS AT TI/SI AND TI/OXYGEN/SI INTERFACES
    BUTZ, R
    RUBLOFF, GW
    HO, PS
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1983, 1 (02): : 771 - 775
  • [7] REFLECTION ELECTRON-ENERGY-LOSS INVESTIGATION OF THE ELECTRONIC AND STRUCTURAL-PROPERTIES OF PALLADIUM
    CHIARELLO, G
    COLAVITA, E
    DECRESCENZI, M
    NANNARONE, S
    [J]. PHYSICAL REVIEW B, 1984, 29 (09): : 4878 - 4889
  • [8] EXTENDED FINE-STRUCTURE ABOVE VANADIUM L-SHELL APPEARANCE POTENTIAL THRESHOLDS
    COHEN, PI
    EINSTEIN, TL
    ELAM, WT
    FUKUDA, Y
    PARK, RL
    [J]. APPLIED SURFACE SCIENCE, 1978, 1 (04) : 538 - 546
  • [9] EXTENDED FINE-STRUCTURES ABOVE TI L2,3 EDGE - A COMPARISON BETWEEN REFLECTION ENERGY-LOSS AND EXTENDED X-RAY-ABSORPTION FINE-STRUCTURE RESULTS
    DECRESCENZI, M
    CHIARELLO, G
    COLAVITA, E
    MEMEO, R
    [J]. PHYSICAL REVIEW B, 1984, 29 (06): : 3730 - 3732
  • [10] DECRESCENZI M, 1985, J PHYS C SOLID STATE, V18, P3595, DOI 10.1088/0022-3719/18/18/024