RANGE PROFILES OF AR IMPLANTED INTO C-FILMS

被引：10

作者：

ABEL, F

BEHAR, M

COHEN, C

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1988年 / 30卷 / 01期

关键词：

D O I：

10.1016/0168-583X(88)90071-7

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：13 / 15

页数：3

共 9 条

[1]

BEHAR M, 1985, NUCL INSTRUM METH B, V6, P453, DOI 10.1016/0168-583X(85)90002-3

[2] NEW PROJECTED RANGE ALGORITHM AS DERIVED FROM TRANSPORT-EQUATIONS [J].

BIERSACK, JP .

ZEITSCHRIFT FUR PHYSIK A-HADRONS AND NUCLEI, 1982, 305 (02) :95-101

[3] EFFECTIVE STOPPING-POWER CHARGES OF SWIFT IONS IN CONDENSED MATTER [J].

BRANDT, W ;

KITAGAWA, M .

PHYSICAL REVIEW B, 1982, 25 (09) :5631-5637

[4] RANGE PROFILES OF 10 TO 390 KEV IONS (29-LESS-THAN-OR-EQUAL-TO-Z1-LESS-THAN-OR-EQUAL-TO-83) IMPLANTED INTO AMORPHOUS-SILICON [J].

FICHTNER, PFP ;

BEHAR, M ;

OLIVIERI, CA ;

LIVI, RP ;

DESOUZA, JP ;

ZAWISLAK, FC ;

BIERSACK, JP ;

FINK, D .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 28 (04) :481-487

[5]

FICHTNER PFP, 1985, NUCL INSTR METH B, V15, P58

[6] PROJECTED RANGES AND RANGE STRAGGLINGS OF AU AND BI IMPLANTED INTO CARBON-FILMS AND INTO SIO2 [J].

GRANDE, PL ;

FICHTNER, PFP ;

BEHAR, M ;

LIVI, RP ;

ZAWISLAK, FC ;

BIERSACK, JP ;

FINK, D ;

MERTENS, P .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 19-20 :25-27

[7]

GRANDE PL, COMMUNICATION

[8] STOPPING POWER VALUES OF BE, C, AL AND SI FOR HE-4 IONS [J].

SANTRY, DC ;

WERNER, RD .

NUCLEAR INSTRUMENTS & METHODS, 1980, 178 (2-3) :523-530

[9]

Ziegler J.F., 1985, STOPPING RANGE IONS

← 1 →