THE USE OF LANGMUIR PROBES AND OPTICAL-EMISSION SPECTROSCOPY TO MEASURE ELECTRON-ENERGY DISTRIBUTION-FUNCTIONS IN RF-GENERATED ARGON PLASMAS

被引：96

作者：

COX, TI ^{[1
]}

DESHMUKH, VGI ^{[1
]}

HOPE, DAO ^{[1
]}

HYDES, AJ ^{[1
]}

BRAITHWAITE, NS ^{[1
]}

BENJAMIN, NMP ^{[1
]}

机构：

[1] UNIV OXFORD, DEPT ENGN SCI, OXFORD OX1 3PJ, ENGLAND

来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1987年 / 20卷 / 07期

关键词：

D O I：

10.1088/0022-3727/20/7/002

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：820 / 831

页数：12

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