RF SPUTTERING OF ZNO SHEAR-WAVE TRANSDUCERS

被引：62

作者：

LEHMANN, HW ^{[1
]}

WIDMER, R ^{[1
]}

机构：

[1] LABS RCA LTD, ZURICH, SWITZERLAND

来源：

JOURNAL OF APPLIED PHYSICS | 1973年 / 44卷 / 09期

关键词：

D O I：

10.1063/1.1662864

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：3868 / 3879

页数：12

相关论文

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[1] PREFERRED ORIENTATION DETERMINATION USING A GEIGER COUNTER X-RAY DIFFRACTION GONIOMETER
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[3] C-AXIS ORIENTATION OF SPUTTERED ZNO FILMS
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[5] PERFORMANCE OF SHEAR MODE ZINC OXIDE THIN-FILM ULTRASONIC TRANSDUCERS
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[6] CRYSTALLOGRAPHIC ORIENTATION OF ZINC OXIDE FILMS DEPOSITED BY TRIODE SPUTTERING
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[7] ZINC OXIDE FILM TRANSDUCERS - (PIEZOELECTRICS - ULTRASONICS - TRANSDUCERS - EFFICIENCY - E)
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[8] ULTRA-HIGH FREQUENCY CADMIUM-SULPHIDE TRANSDUCERS
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[J]. IEEE TRANSACTIONS ON SONICS AND ULTRASONICS, 1964, SU11 (02): : 63 - +
[9] CADMIUM SULPHIDE EVAPORATED-LAYER TRANSDUCERS
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[J]. PROCEEDINGS OF THE INSTITUTE OF ELECTRICAL AND ELECTRONICS ENGINEERS, 1965, 53 (10): : 1400 - +
[10] CADMIUM SULPHIDE AND ZINC OXIDE THIN-FILM TRANSDUCERS
FOSTER, NF
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[J]. IEEE TRANSACTIONS ON SONICS AND ULTRASONICS, 1968, SU15 (01): : 28 - &

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