RF SPUTTERING OF ZNO SHEAR-WAVE TRANSDUCERS

被引：62

作者：

LEHMANN, HW ^{[1
]}

WIDMER, R ^{[1
]}

机构：

[1] LABS RCA LTD, ZURICH, SWITZERLAND

来源：

JOURNAL OF APPLIED PHYSICS | 1973年 / 44卷 / 09期

关键词：

D O I：

10.1063/1.1662864

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：3868 / 3879

页数：12

共 31 条

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