THINNING OF LINBO3 FOR ACOUSTOOPTIC DEFLECTORS BY ION ETCHING

被引：2
|
作者：
YASUDA, H
YAMAGUCHI, M
NAGAI, K
机构：
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS | 1972年 / 11卷 / 08期
关键词：
D O I：
10.1143/JJAP.11.1216
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：1216 / +
页数：1
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