A DESIGN METHOD FOR MICROMECHANICAL FILTERS WITH QUARTER WAVELENGTH ELEMENTS

被引：1

作者：

SATOH, H

机构：

[1] Tamagawa University, Machida, Tokyo

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1992年 / 31卷

关键词：

ELECTROMECHANICAL; FILTER; PIEZOELECTRIC; THIN FILM; LENGTH EXPANDER; THICKNESS EXPANDER;

D O I：

10.7567/JJAPS.31S1.184

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Length expander type and thickness expander type micro-mechanical filters are proposed in this paper as attractive elements for an on-chip structure forming. The design principles have been theoretically studied by using a distributed constant circuit design theory. As the result, it is clarified that the method of inserting additional step elements in the middle of the filter is valid for solving the actualization problem of a large impedance step and a filter with the fractional bandwidth of less than 3% is realizable in a VHF and UHF band.

引用

页码：184 / 186

页数：3