STRUCTURE AND INTERNAL-STRESS IN ULTRATHIN SILVER FILMS DEPOSITED ON MGF2 AND SIO SUBSTRATES

被引:126
作者
ABERMANN, R
KRAMER, R
MASER, J
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D O I
10.1016/0040-6090(78)90140-2
中图分类号
T [工业技术];
学科分类号
08 ;
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页码:215 / 229
页数:15
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