OPTIMIZATION OF THE PROPERTIES OF A MICROFOCUSED ION-BEAM SYSTEM

被引：0
作者：
AMOS, RJ
EVANS, GA
GHAZIKHANIAN, J
SMITH, R
STOREY, C
机构：
来源：
JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS | 1988年 / 21卷 / 01期
关键词：
D O I：
10.1088/0022-3735/21/1/016
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
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页码：86 / 91
页数：6
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