OPTIMIZATION OF THE PROPERTIES OF A MICROFOCUSED ION-BEAM SYSTEM

被引：0
作者：
AMOS, RJ
EVANS, GA
GHAZIKHANIAN, J
SMITH, R
STOREY, C
机构：
来源：
JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS | 1988年 / 21卷 / 01期
关键词：
D O I：
10.1088/0022-3735/21/1/016
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：86 / 91
页数：6
相关论文
共 50 条
  • [21] Properties of films obtained by ion-beam sputtering
    Muranova, GA
    Smirnov, NN
    JOURNAL OF OPTICAL TECHNOLOGY, 2001, 68 (04) : 282 - 286
  • [22] OPTIMIZATION OF SIMOX STRUCTURES FORMED BY ION-BEAM SYNTHESIS
    REESON, KJ
    STEPHENS, KG
    HEMMENT, PLF
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1989, 37-8 : 290 - 295
  • [23] OPTIMIZATION OF THINNING RATES IN AN ARGON ION-BEAM THINNER
    MCCREDIE, GM
    PHILLIPS, MR
    MOON, AR
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1991, 62 (07) : 1855 - 1856
  • [24] INFLUENCE OF SOURCE PARAMETERS ON PROPERTIES OF AN ION-BEAM
    WITTMAACK, K
    SCHULZ, F
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1973, 10 (06): : 918 - 921
  • [25] Analysis, design, and optimization of ion-beam lithography masks
    Tejeda, RO
    Engelstad, RL
    Lovell, EG
    Berry, IL
    EMERGING LITHOGRAPHIC TECHNOLOGIES II, 1998, 3331 : 621 - 628
  • [26] NORMAL MODES IN ION-BEAM - PLASMA SYSTEM
    GRESILLON, D
    DOVEIL, F
    PHYSICAL REVIEW LETTERS, 1975, 34 (02) : 77 - 80
  • [27] PLASMA DIAGNOSTICS OF AN ECR ION-BEAM SYSTEM
    MOHL, W
    MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 1991, 139 : 6 - 8
  • [28] CHAOTIC ATTRACTORS IN ION-BEAM PLASMA SYSTEM
    BURAGOHAIN, A
    BAILUNG, H
    SARMA, BK
    CHUTIA, J
    NAKAMURA, Y
    CHAOS SOLITONS & FRACTALS, 1994, 4 (05) : 677 - 680
  • [29] SYSTEM FOR PROGRAMMABLE MICROPROCESSING BY SUBMICRON ION-BEAM
    DUBROVIN, AN
    DUDNIKOV, VG
    KOVALEVSKII, DV
    SHABALIN, AL
    INSTRUMENTS AND EXPERIMENTAL TECHNIQUES, 1991, 34 (02) : 430 - 434
  • [30] REACTIVE ION-BEAM DEPOSITION AND CLEANING SYSTEM
    YAMADA, H
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1989, 60 (06) : 1169 - 1173
12345