CHARACTERIZATION OF SILICA OVERLAYERS DEPOSITED ON ZRO2 AND TIO2 BY CVD OF SI(OC2H5)4

被引：11

作者：

JIN, T ^{[1
]}

WHITE, JM ^{[1
]}

机构：

[1] UNIV TEXAS,CTR MAT CHEM,AUSTIN,TX 78712

来源：

SURFACE AND INTERFACE ANALYSIS | 1988年 / 11卷 / 10期

关键词：

D O I：

10.1002/sia.740111005

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：517 / 521

页数：5

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