ELLIPSOMETRIC ANALYSIS FOR SURFACE-ROUGHNESS AND TEXTURE

被引：62
作者：
NEE, SMF
机构：
来源：
APPLIED OPTICS | 1988年 / 27卷 / 14期
关键词：
D O I：
10.1364/AO.27.002819
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
引用
收藏
页码：2819 / 2831
页数：13
相关论文
共 31 条
[1]   STUDIES OF SURFACE, THIN-FILM AND INTERFACE PROPERTIES BY AUTOMATIC SPECTROSCOPIC ELLIPSOMETRY [J].
ASPNES, DE .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 18 (02) :289-295
[2]   INVESTIGATION OF EFFECTIVE-MEDIUM MODELS OF MICROSCOPIC SURFACE-ROUGHNESS BY SPECTROSCOPIC ELLIPSOMETRY [J].
ASPNES, DE ;
THEETEN, JB .
PHYSICAL REVIEW B, 1979, 20 (08) :3292-3302
[3]   OPTICAL-PROPERTIES OF THIN-FILMS [J].
ASPNES, DE .
THIN SOLID FILMS, 1982, 89 (03) :249-262
[4]  
Azzam RMA, 1977, ELLIPSOMETRY POLARIZ
[5]   STYLUS PROFILING INSTRUMENT FOR MEASURING STATISTICAL PROPERTIES OF SMOOTH OPTICAL-SURFACES [J].
BENNETT, JM ;
DANCY, JH .
APPLIED OPTICS, 1981, 20 (10) :1785-1802
[6]  
BLANCO JR, 1985, APPL OPTICS, V24, P3773, DOI 10.1364/AO.24.003773
[7]   Calculation of various physics constants in heterogenous substances I Dielectricity constants and conductivity of mixed bodies from isotropic substances [J].
Bruggeman, DAG .
ANNALEN DER PHYSIK, 1935, 24 (07) :636-664
[8]   ROUGHNESS STUDIES OF ION-BEAM PROCESSED MOLYBDENUM SURFACES [J].
BUABBUD, GH ;
MATHINE, DL ;
SNYDER, P ;
WOOLLAM, JA ;
POKER, D ;
BENNETT, J ;
INGRAM, D ;
PRONKO, PP .
JOURNAL OF APPLIED PHYSICS, 1986, 59 (01) :257-262
[9]   EFFECT OF THIN SURFACE FILM ON ELLIPSOMETRIC DETERMINATION OF OPTICAL CONSTANTS [J].
BURGE, DK ;
BENNETT, HE .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1964, 54 (12) :1428-&
[10]   RESIDUAL SURFACE-ROUGHNESS OF DIAMOND-TURNED OPTICS [J].
CHURCH, EL ;
ZAVADA, JM .
APPLIED OPTICS, 1975, 14 (08) :1788-1795
1234