LMM AND LVV AUGER ELECTRONS INDUCED BY AR+ ION IMPACT ON A SI SURFACE

被引：8
作者：
SAIKI, K [1 ]
RITTAPORN, I [1 ]
TANAKA, S [1 ]
机构：
[1] UNIV TOKYO,DEPT APPL PHYS,BUNKYO KU,TOKYO 113,JAPAN
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1987年 / 26卷 / 01期
关键词：
D O I：
10.1143/JJAP.26.45
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
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页码：45 / 50
页数：6
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