SPECTROSCOPIC IR ELLIPSOMETRY WITH IMPERFECT COMPONENTS

被引：13
|
作者：
DENBOER, JHWG
KROESEN, GMW
HAVERLAG, M
DEHOOG, FJ
机构：
[1] Eindhoven University of Technology, 5600 MB Eindhoven
来源：
THIN SOLID FILMS | 1993年 / 234卷 / 1-2期
关键词：
D O I：
10.1016/0040-6090(93)90278-W
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
In this paper the effect of imperfect components in a spectroscopic IR ellipsometer on the ellipsometer behaviour is investigated. Polarizers, source and detector are described by Mueller matrices. A possibility of constructing better wire grid polarizers is discussed. Calculations are performed analytically, leading to new criteria for the calibration of a spectroscopic ellipsometer.
引用
收藏
页码：323 / 326
页数：4
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