PREPARATION OF LEAD ZIRCONATE TITANATE THIN-FILM BY HYDROTHERMAL METHOD

被引:165
作者
SHIMOMURA, K
TSURUMI, T
OHBA, Y
DAIMON, M
机构
[1] Department of Inorganic Materials, Tokyo Institute of Technology, 152
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1991年 / 30卷 / 9B期
关键词
FERROELECTRICS; THIN FILMS; HYDROTHERMAL METHOD; PZT; NUCLEATION; CRYSTAL GROWTH;
D O I
10.1143/JJAP.30.2174
中图分类号
O59 [应用物理学];
学科分类号
摘要
A hydrothermal method for preparing thin films of crystalline PZT was developed by controlling the rates of nucleation and crystal growth. This method consisted of two steps of hydrothermal reaction. The first step (nucleation process) was that in which the TiO2 substrate reacted with the mixed solution of Pb and Zr to form PZT and/or PZ nuclei on the surface. Subsequently, the crystal growth of PZT was promoted as the next hydrothermal step (crystal growth process) by the reaction of the mixed solution of Pb, Zr and Ti. From the experimental results of PZT powder preparation, the conditions of the nucleation and crystal growth process were determined as at 150-degrees-C for 24 h and at 120-degrees-C for 48 h, respectively. It was verified that the thin films consisted of PZT polycrystals and showed ferroelectric properties.
引用
收藏
页码:2174 / 2177
页数:4
相关论文
共 11 条
[1]   ION-BEAM DEPOSITION OF THIN-FILMS OF FERROELECTRIC LEAD ZIRCONATE TITANATE (PZT) [J].
CASTELLANO, RN ;
FEINSTEIN, LG .
JOURNAL OF APPLIED PHYSICS, 1979, 50 (06) :4406-4411
[2]  
CROTEAU A, 1986, 6TH P IEEE INT S APP, P606
[3]  
FUNAKUBO H, 1991, NIPPON SERAM KYO GAK, V99, P248, DOI 10.2109/jcersj.99.248
[4]  
ICHIHARA T, 1990, NIPPON SERAM KYO GAK, V98, P150, DOI 10.2109/jcersj.98.150
[5]   PREPARATION OF TETRAGONAL BARIUM-TITANATE THIN-FILM ON TITANIUM METAL-SUBSTRATE BY HYDROTHERMAL METHOD [J].
KAJIYOSHI, K ;
ISHIZAWA, N ;
YOSHIMURA, M .
JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1991, 74 (02) :369-374
[6]  
KAJIYOSHI K, 1990, JPN J APPL PHYS, V30, pL120
[7]  
LEE KH, 1987, YOGYO-KYOKAI-SHI, V95, P736
[8]   PREPARATION OF PB(ZR,TI)O3 THIN-FILMS BY AN ELECTRON-BEAM EVAPORATION TECHNIQUE [J].
OIKAWA, M ;
TODA, K .
APPLIED PHYSICS LETTERS, 1976, 29 (08) :491-492
[9]  
OKAZAKI K, 1983, SERAMIKKU YUDENTAI K, P334
[10]   PREPARATION OF EPITAXIAL PB(ZRXTI1-X)O3 THIN-FILMS AND THEIR CRYSTALLOGRAPHIC, PYROELECTRIC, AND FERROELECTRIC PROPERTIES [J].
TAKAYAMA, R ;
TOMITA, Y .
JOURNAL OF APPLIED PHYSICS, 1989, 65 (04) :1666-1670