DEPOSITION OF NEW PIEZOELECTRIC TA2O5 THIN-FILMS AND THEIR SURFACE ACOUSTIC-WAVE PROPERTIES

被引：32

作者：

NAKAGAWA, Y

GOMI, Y

OKADA, T

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1987年 / 61卷 / 11期

关键词：

D O I：

10.1063/1.338321

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：5012 / 5017

页数：6

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