PREPARATION AND PROPERTIES OF AMORPHOUS GERMANIUM NITRIDE FILMS

被引:32
作者
NAGAI, H
NIIMI, T
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D O I
10.1149/1.2411387
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
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页码:671 / &
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