RF SPUTTERED TANTALUM FILMS DEPOSITED IN AN OXYGEN DOPED ATMOSPHERE - REPLY

被引：2
|
作者：
BAKER, PN
机构：
来源：
THIN SOLID FILMS | 1971年 / 8卷 / 01期
关键词：
D O I：
10.1016/0040-6090(71)90100-3
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：R3 / &
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