DIFFUSION BARRIER WITH REACTIVELY SPUTTERED TIN FOR THERMALLY STABLE CONTACT

被引：2
作者：
MITSUHASHI, K
YAMAZAKI, O
OHTAKE, K
KOBA, M
机构：
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1988年 / 27卷 / 12期
关键词：
D O I：
10.1143/JJAP.27.L2401
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
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页码：L2401 / L2403
页数：3
相关论文
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