SPECTROSCOPIC ELLIPSOMETRY OF ULTRATHIN FILMS - FROM UV TO IR

被引：34

作者：

DREVILLON, B

机构：

[1] CNRS, France

来源：

THIN SOLID FILMS | 1988年 / 163卷

关键词：

D O I：

10.1016/0040-6090(88)90420-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：157 / 166

页数：10

共 27 条

[1]

ACHER O, IN PRESS REV SCI INS

[2] INSITU INVESTIGATION OF THE EARLY STAGE OF THE GROWTH OF A-SI-H ON SILICA AND TIN DIOXIDE SUBSTRATES [J].

ANTOINE, AM ;

DREVILLON, B .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 1987, 97-8 :1403-1406

[3] INSITU INVESTIGATION OF THE GROWTH OF RF GLOW-DISCHARGE DEPOSITED AMORPHOUS-GERMANIUM AND SILICON FILMS [J].

ANTOINE, AM ;

DREVILLON, B ;

CABARROCAS, PRI .

JOURNAL OF APPLIED PHYSICS, 1987, 61 (07) :2501-2508

[4] INFLUENCE OF THE SUBSTRATE ON THE EARLY STAGE OF THE GROWTH OF HYDROGENATED AMORPHOUS-SILICON EVIDENCED BY KINETIC ELLIPSOMETRY [J].

ANTOINE, AM ;

DREVILLON, B .

JOURNAL OF APPLIED PHYSICS, 1988, 63 (02) :360-367

[5]

ANTOINE AM, 1987, THESIS U PARIS 7

[6]

ANTOINE AM, 1987, MATER RES SOC S P, V77, P381

[7]

Aspnes D. E., 1983, Journal de Physique Colloque, V44, P3, DOI 10.1051/jphyscol:19831001

[8] HIGH PRECISION SCANNING ELLIPSOMETER [J].

ASPNES, DE ;

STUDNA, AA .

APPLIED OPTICS, 1975, 14 (01) :220-228

[9] OPTICAL-PROPERTIES OF THIN-FILMS [J].

ASPNES, DE .

THIN SOLID FILMS, 1982, 89 (03) :249-262

[10] INFRARED ELLIPSOMETRY STUDY OF THE VIBRATIONAL PROPERTIES OF A-SI-H, A-SIC-H AND A-SIGE-H ULTRATHIN FILMS [J].

BENFERHAT, R ;

DREVILLON, B .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 1987, 97-8 :835-838

← 1 2 3 →