THICKNESS DEPENDENCE OF MATERIAL QUALITY IN GAAS-ON-SI GROWN BY METALORGANIC CHEMICAL VAPOR-DEPOSITION

被引：37
|
作者：
PEARTON, SJ [1 ]
ABERNATHY, CR [1 ]
CARUSO, R [1 ]
VERNON, SM [1 ]
SHORT, KT [1 ]
BROWN, JM [1 ]
CHU, SNG [1 ]
STAVOLA, M [1 ]
HAVEN, VE [1 ]
机构：
[1] SPIRE CORP,BEDFORD,MA 01730
来源：
JOURNAL OF APPLIED PHYSICS | 1988年 / 63卷 / 03期
关键词：
D O I：
10.1063/1.341141
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：775 / 783
页数：9
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