INVESTIGATION OF SURFACE-TOPOGRAPHY USING THE BACKSCATTERED ELECTRON SIGNAL

被引：11
|
作者：
KACZMAREK, D
CZYZEWSKI, Z
HEJNA, J
RADZIMSKI, Z
机构：
来源：
SCANNING | 1987年 / 9卷 / 03期
关键词：
D O I：
10.1002/sca.4950090304
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：109 / 116
页数：8
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