A Method for Determining Absorption Parameters Based on the Multi-Beam Dynamical Theory of Electron Diffraction

被引:7
作者
Sheinin, S. S. [1 ]
Botros, K. Z. [1 ]
Cann, C. D. [1 ]
机构
[1] Univ Alberta, Dept Phys, Edmonton, AB, Canada
来源
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE | 1970年 / 3卷 / 02期
关键词
D O I
10.1002/pssa.19700030229
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A method for determining absorption parameters, which is based on the multi-beam dynamical theory of electron diffraction, has been developed. The method is based on the sensitivity of computer calculated multi-beam intensity profiles to the values of the absorption parameters used. Experimental intensity profiles are obtained by making use of the fact that a specimen can be tilted to an orientation where multi-beam effects are important. Experimental absorption parameters obtained for molybdenum are in good agreement with the theoretical values of Humphreys and Hirsch.
引用
收藏
页码:537 / 543
页数:7
相关论文
共 11 条
[1]   DEPENDENCE OF EXTINCTION DISTANCE ON DEVIATION FROM BRAGG CONDITION IN SILICON [J].
CANN, CD ;
SHEININ, SS .
PHYSICA STATUS SOLIDI, 1968, 30 (02) :791-&
[2]  
DUPOUY G, 1965, J MICROSC-PARIS, V4, P429
[3]   EFFECTS OF SYSTEMATIC REFLECTIONS ON MEASUREMENTS OF EXTINCTION DISTANCE AND ABSORPTION OF HIGH ENERGY ELECTRONS IN CRYSTALS [J].
GORINGE, MJ ;
HOWIE, A ;
WHELAN, MJ .
PHILOSOPHICAL MAGAZINE, 1966, 14 (128) :217-&
[5]   ABSORPTION PARAMETERS IN ELECTRON DIFFRACTION THEORY [J].
HUMPHREYS, CJ ;
HIRSCH, PB .
PHILOSOPHICAL MAGAZINE, 1968, 18 (151) :115-+
[6]  
Metherell A. J. F., 1969, PHILOS MAG, V15, P763
[7]   MEASUREMENT OF ABSORPTION OF FAST ELECTRONS IN SINGLE CRYSTAL FILMS OF ALUMINIUM [J].
METHERELL, AJ ;
WHELAN, MJ .
PHILOSOPHICAL MAGAZINE, 1967, 15 (136) :755-+
[8]   CONSEQUENCES OF BLOCHS THEOREM ON DYNAMICAL THEORY OF ELECTRON DIFFRACTION CONTRAST [J].
METHERELL, AJ ;
FISHER, RM .
PHYSICA STATUS SOLIDI, 1969, 32 (02) :551-+
[9]   EFFECT OF ABSORPTION ON MULTI-BEAM INTENSITY PROFILES OF WEDGE CRYSTALS [J].
SHEININ, SS ;
CANN, CD .
PHYSICA STATUS SOLIDI, 1968, 28 (01) :187-&
[10]   EFFECT OF SYSTEMATIC REFLECTIONS ON (110) EXTINCTION DISTANCE IN MOLYBDENUM [J].
SHEININ, SS .
PHYSICA STATUS SOLIDI, 1967, 21 (01) :247-&