THEORY AND IMPROVEMENTS FOR SNMS DEPTH PROFILING WITH INA3

被引：5
|
作者：
UHLEMANN, S
WEISSBRODT, P
MADEMANN, D
机构：
[1] TH DARMSTADT,INST ANGEW PHYS,W-6100 DARMSTADT,GERMANY
[2] JENOPT GMBH,O-6900 JENA,GERMANY
来源：
FRESENIUS JOURNAL OF ANALYTICAL CHEMISTRY | 1993年 / 346卷 / 1-3期
关键词：
D O I：
10.1007/BF00321454
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
Optimization of SNMS depth profiling using the direct bombardment mode (DBM) is possible by improvement of the ion current density distribution, reduction of bombardment energy and independent choice of current density. A model for primary ion extraction is presented and ion current density distributions have been calculated for different sample holder arrangements. Using the simulation procedure optimal extraction conditions can be predicted for conventional arrangements and suggestions for new ones can be made. The best depth resolution has been obtained using a new extraction arrangement with an additional aperture.
引用
收藏
页码：374 / 379
页数：6
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