METALLURGY OF PLATINUM SILICIDE CONTACTS

被引：0
|
作者：
KOCH, FB
BYRNES, PA
机构：
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1970年 / 117卷 / 08期
关键词：
D O I：
暂无
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：C262 / &
相关论文
共 50 条
  • [41] INTERFACE METALLURGY FOR MERCURY CONTACTS.
    Tu, K.N.
    Wu, C.T.
    IBM technical disclosure bulletin, 1983, 25 (11 A):
  • [42] IDEAL SWITCH CONTACTS - MATTER OF METALLURGY
    KOENEKE, K
    MACHINE DESIGN, 1978, 50 (07) : 71 - 75
  • [43] NOISE PROPERTIES OF SILICIDE SILICON SCHOTTKY CONTACTS
    GUTTLER, HH
    WERNER, JH
    JOURNAL OF ELECTRONIC MATERIALS, 1990, 19 (07) : 49 - 49
  • [44] PROPERTIES OF PALLADIUM SILICIDE-SILICON CONTACTS
    KIRCHER, CJ
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1970, 117 (03) : C100 - &
  • [45] Study of silicide contacts to SiGe source/drain
    Lauwers, A.
    van Dal, M. J. H.
    Verheyen, P.
    Chamirian, O.
    Demeurisse, C.
    Mertens, S.
    Vrancken, C.
    Verheyden, K.
    Funk, K.
    Kittl, J. A.
    MICROELECTRONIC ENGINEERING, 2006, 83 (11-12) : 2268 - 2271
  • [46] TITANIUM SILICIDE CONTACTS ON SEMICONDUCTING DIAMOND SUBSTRATES
    HUMPHREYS, TP
    LABRASCA, JV
    NEMANICH, RJ
    DAS, K
    POSTHILL, JB
    ELECTRONICS LETTERS, 1991, 27 (17) : 1515 - 1516
  • [47] An Investigation of Electrical Contacts for Higher Manganese Silicide
    Xinghua Shi
    Zahra Zamanipour
    Jerzy S. Krasinski
    Alan Tree
    Daryoosh Vashaee
    Journal of Electronic Materials, 2012, 41 : 2331 - 2337
  • [48] PTSI CONTACT METALLURGY - EFFECT OF SILICIDE FORMATION PROCESS
    CHANG, CA
    JOURNAL OF APPLIED PHYSICS, 1985, 58 (08) : 3258 - 3261
  • [49] Tailoring of nickel silicide contacts on silicon carbide
    Perez-Garcia, S. A.
    Nyborg, L.
    APPLIED SURFACE SCIENCE, 2007, 254 (01) : 135 - 138
  • [50] ACCURATE BARRIER MODELING OF METAL AND SILICIDE CONTACTS
    SHENAI, K
    SANGIORGI, E
    SARASWAT, KC
    SWANSON, RM
    DUTTON, RW
    IEEE ELECTRON DEVICE LETTERS, 1984, 5 (05) : 145 - 147
12345