DEVELOPMENT OF A COBALT LIQUID ALLOY ION-SOURCE

被引：26
作者：
HESSE, E
BISCHOFF, L
TEICHERT, J
机构：
[1] Research Center Rossendorl Inc., Dresden, D-01314
来源：
JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1994年 / 27卷 / 02期
关键词：
D O I：
10.1088/0022-3727/27/2/038
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
A cobalt-neodymium liquid alloy ion source for applications in focused ion beam devices was developed and investigated. The performance and the main parameters of the ion source are presented.
引用
收藏
页码：427 / 428
页数：2
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