CHARACTERIZATION OF ELECTRONIC DEVICES AND MATERIALS BY SURFACE-SENSITIVE ANALYTICAL TECHNIQUES

被引：21
作者：
HOLLOWAY, PH [1 ]
MCGUIRE, GE [1 ]
机构：
[1] TEKTRONIX INC, MAT CHARACTERIZAT LAB, PORTLAND, OR 97077 USA
来源：
APPLICATIONS OF SURFACE SCIENCE | 1980年 / 4卷 / 3-4期
关键词：
D O I：
10.1016/0378-5963(80)90088-4
中图分类号：
学科分类号：
摘要：
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页码：410 / 444
页数：35
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